Cleanroom Cranes
The clean room cranes used for semiconductor wafer handling adopts oil-free, low-particle and precision positioning design to ensure safe wafer handling and high cleanliness of the production line.
Product Description
Clean room cranes designed specifically for the precise handling of semiconductor wafers ensure safe, reliable, and efficient material transfer and positioning without compromising the wafer clean environment or process accuracy.
The Importance of Clean Room Cranes in the Semiconductor Industry
● Semiconductor wafer manufacturing is extremely sensitive to particles, oil mist and tiny foreign matter, and any external contamination will lead to a decrease in yield.
● Wafer, lithography machine, and related equipment are extremely sensitive to vibration, requiring handling equipment to ensure micro-vibration control and precise positioning.
● The high frequency of wafer handling requires stable, repetitive motion and support for work record keeping and traceability.
Product Features of Semiconductor Clean Room Cranes
● Oil-free or sealed lubrication solutions prevent lubricant evaporation and oil mist generation; the stainless steel housing is easy to clean and reduces particle release.
● High-precision servo motors and variable frequency drive technology enable smooth soft starts and stops, preventing shock and vibration.
● Combined with precision gear, rack, or servo control systems, the cranes achieve millimeter-level positioning accuracy.
● It includes position limits, overload detection, emergency stop, automatic return, and multiple safeguards to ensure wafer and equipment safety.
● The overall design meets ISO Class 5-8 cleanroom requirements and effectively supports international standards such as GMP.
Technical Parameters (for reference only)
● Rated load: 200kg - 5000kg
● Lifting height: 3m - 8m
● Span: Customizable
● Positioning accuracy: ±1mm
● Lifting device: Cleanroom chain hoist / belt hoist
● Control system: Wireless remote control / PLC
● Cleanliness class: ISO Class 5-8
● Power supply: Three-phase 380V / 50Hz
Application Conditions
● Wafer carrier handling between lithography equipment
● Wafer loader loading and unloading to equipment
● Tool handling for precision test benches
Contact us today to provide your cleanroom class, wafer carrier specifications, and handling path. We will develop a customized cleanroom lifting solution and provide a quick quote and delivery time.
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